Composition and tribological characterization of chemically vapour-deposited TiN layer
L. Fouilland, L. Imhoff, A. Bouteville, S. Benayoun, J.C. Remy, J. Perrière, M. MorcretteVolume:
100-101
Year:
1998
Language:
english
Pages:
3
DOI:
10.1016/s0257-8972(97)00604-x
File:
PDF, 311 KB
english, 1998