Dependence on the C2H4 and SiH4 gas mixture of the Si-C film properties obtained by excimer lamp chemical vapour deposition
X. Redondas, P. González, B. León, M. Pérez-AmorVolume:
100-101
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(97)00607-5
File:
PDF, 380 KB
english, 1998