Microhardness and adhesion measurements of reactively sputtered TiN/AlN multilayer coatings deposited as function of mass-flow of nitrogen
I. Manika, F. Muktepavela, H. Jensen, J. Sobota, G. SorensenVolume:
100-101
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(97)00644-0
File:
PDF, 404 KB
english, 1998