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Comparison of modifications induced by ArF excimer laser irradiation on silicon nitride films deposited by different LCVD methods
N. Banerji, J. Serra, C. Serra, S. Chiussi, F. Lusquiños, X. Redondas, B. Léon, M. Pérez-AmorVolume:
100-101
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(97)00655-5
File:
PDF, 601 KB
english, 1998