Effect of surface pretreatment on interfacial chemical...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2015 / 09 Vol. 33; Iss. 5

Effect of surface pretreatment on interfacial chemical bonding states of atomic layer deposited ZrO2 on AlGaN

Ye, Gang, Wang, Hong, Ng, Serene Lay Geok, Ji, Rong, Arulkumaran, Subramaniam, Ng, Geok Ing, Li, Yang, Liu, Zhi Hong, Ang, Kian Siong
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4927164
Date:
September, 2015
File:
PDF, 1.58 MB
english, 2015
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