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Ti/TiN multilayers for hard coatings applications: in-situ characterization by real time spectroscopic ellipsometry
Pierre Boher, Jean Louis Stehle, Sid Labdi, Philippe HoudyVolume:
100-101
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(97)00677-4
File:
PDF, 432 KB
english, 1998