Nitrogen ion implantation of silicon-containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition
Costas G. Fountzoulas, J.Derek Demaree, James K. Hirvonen, James D. KleinmeyerVolume:
103-104
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(98)00381-8
File:
PDF, 449 KB
english, 1998