Research in and industrial application of metal source ion...

Research in and industrial application of metal source ion implantation at Beijing Normal University

Huixing Zhang, Xiaoji Zhang, Fengsheng Zhou, Qiang Li, Xanying Wu, Wenlian Lin, Tonghe Zhang
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Volume:
103-104
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(98)00398-3
File:
PDF, 627 KB
english, 1998
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