Successive implantation of aluminium by carbon and nitrogen...

Surface and Coatings Technology 1998 Vol. 103-104; Iss. none

Successive implantation of aluminium by carbon and nitrogen ions

V.V Uglov, N.N Cherenda, A.L Danilyuk, V.V Khodasevich, A Wenzel, J Gerlach, B Rauschenbach
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Volume:
103-104
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(98)00406-x
File:
PDF, 188 KB
english, 1998
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