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Modified layer formation by means of high current density nitrogen and boron implantation
V.V. Uglov, D.P. Rusalsky, V.V. Khodasevich, A.L. Kholmetskii, R. Wei, J.J. Vajo, I.N. Rumyanceva, P.J. WilburVolume:
103-104
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(98)00407-1
File:
PDF, 922 KB
english, 1998