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Conditions for the formation of cubic boron nitride films by r.f. magnetron sputtering
J Ye, U Rothhaar, H OechsnerVolume:
105
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(98)00479-4
File:
PDF, 233 KB
english, 1998