Characterization of film interface integrity through scanning acoustic microscopy
Sanjai Parthasarathi, Bernhard R Tittmann, Masahiro NishidaVolume:
105
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(98)00484-8
File:
PDF, 1.39 MB
english, 1998