Characterization of film interface integrity through...

Characterization of film interface integrity through scanning acoustic microscopy

Sanjai Parthasarathi, Bernhard R Tittmann, Masahiro Nishida
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Volume:
105
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(98)00484-8
File:
PDF, 1.39 MB
english, 1998
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