Computer simulation of multicomponent ion beam enhanced deposition of (TiMo) N films
Li Guoqing, Ma Tengcai, Zhang Tao, Tang Baoyin, Paul K. ChuVolume:
110
Year:
1998
Language:
english
Pages:
3
DOI:
10.1016/s0257-8972(98)00511-8
File:
PDF, 111 KB
english, 1998