The influence of magnetron configuration on ion current...

The influence of magnetron configuration on ion current density and deposition rate in a dual unbalanced magnetron sputtering system

P.J Kelly, R.D Arnell
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Volume:
108-109
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(98)00566-0
File:
PDF, 811 KB
english, 1998
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