Physical, structural and mechanical characterization of Ti1−xSixNy films
F. Vaz, L. Rebouta, S. Ramos, M.F. da Silva, J.C. SoaresVolume:
108-109
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(98)00620-3
File:
PDF, 146 KB
english, 1998