A pulsed high-current electron–ion-cluster source for the deposition of films and coatings
Sergey A Korenev, Anthony J Perry, Alexander V KalmykovVolume:
108-109
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(98)00653-7
File:
PDF, 427 KB
english, 1998