Deposition of metal nitrides by IBAD

T Šikola, J Spousta, R Češka, J Zlámal, L Dittrichová, A Nebojsa, K Navrátil, D Rafaja, J Zemek, V Peřina

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Volume:

108-109

Year:

1998

Language:

english

Pages:

DOI:

10.1016/s0257-8972(98)00654-9

File:

PDF, 273 KB

english, 1998

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