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Deposition of metal nitrides by IBAD
T Šikola, J Spousta, R Češka, J Zlámal, L Dittrichová, A Nebojsa, K Navrátil, D Rafaja, J Zemek, V PeřinaVolume:
108-109
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0257-8972(98)00654-9
File:
PDF, 273 KB
english, 1998