An in situ/ex situ X-ray analysis system for thin sputtered films
A.K. Malhotra, J.F. Whitacre, Z.B. Zhao, J. Hershberger, S.M. Yalisove, J.C. BilelloVolume:
110
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(98)00678-1
File:
PDF, 350 KB
english, 1998