Preparation of thin film resistors with low resistivity and low TCR by heat treatment of multilayered Cu/Ni deposits
Masami Ishikawa, Hidehiko Enomoto, Naohiro Mikamoto, Tsuneshi Nakamura, Masao Matsuoka, Chiaki IwakuraVolume:
110
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(98)00682-3
File:
PDF, 477 KB
english, 1998