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The effect of NH3 plasma pre-treatment on the properties of TiN coatings produced by plasma-enhanced chemical vapor deposition (PECVD)
Byoung-June Kim, Young-Cheol Kim, Dong-Kak Lee, Jung-Joong LeeVolume:
111
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(98)00707-5
File:
PDF, 894 KB
english, 1999