Hardness and stiffness of amorphous SiCxNy chemical vapor...

Surface and Coatings Technology 1999 Vol. 111; Iss. 2-3

Hardness and stiffness of amorphous SiCxNy chemical vapor deposited coatings

Abderrahim Bendeddouche, René Berjoan, Eric Bêche, Roger Hillel
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Volume:
111
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(98)00733-6
File:
PDF, 217 KB
english, 1999
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