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Effect of repeated Ar+ bombardment on structure and properties of PCVD thin films
F. Xie, J.-W. Yuan, K.-W. Xu, J.-W. HeVolume:
112
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(98)00741-5
File:
PDF, 166 KB
english, 1999