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A 13.56 MHz multicusp ion source for gaseous ion-beam production
Dheerawan Boonyawan, Pradoong Suanpoot, Thiraphat VilaithongVolume:
112
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(98)00742-7
File:
PDF, 250 KB
english, 1999