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The reactive magnetron deposition of CrNxOy films: first results of property investigations
St. Collard, H. Kupfer, G. Hecht, W. Hoyer, H. MoussaouiVolume:
112
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(98)00752-x
File:
PDF, 162 KB
english, 1999