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Hanbit microwave plasma diagnostic system
B.C. Kim, K.D. Lee, S.M. Hwang, G.S. Lee, K.H. ChungVolume:
112
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(98)00754-3
File:
PDF, 371 KB
english, 1999