Surface cleaning by plasma-enhanced desorption of...

Surface cleaning by plasma-enhanced desorption of contaminants (PEDC)

P. Krüger, R. Knes, J. Friedrich
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Volume:
112
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(98)00777-4
File:
PDF, 256 KB
english, 1999
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