![](/img/cover-not-exists.png)
Surface cleaning by plasma-enhanced desorption of contaminants (PEDC)
P. Krüger, R. Knes, J. FriedrichVolume:
112
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(98)00777-4
File:
PDF, 256 KB
english, 1999