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Plasma cleaning of copper leadframe with Ar and Ar/H2 gases
J.H. Hsieh, L.H. Fong, S. Yi, G. MethaVolume:
112
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(98)00779-8
File:
PDF, 495 KB
english, 1999