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Plasma deposition of tribological and optical thin film materials with a filtered cathodic arc source
P.J. Martin, A. Bendavid, R.P. Netterfield, T.J. Kinder, F. Jahan, G. SmithVolume:
112
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(98)00784-1
File:
PDF, 137 KB
english, 1999