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Characterization of the arc evaporation of a hot boron cathode
F Richter, G Flemming, M Kühn, S Peter, H WagnerVolume:
112
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(98)00805-6
File:
PDF, 199 KB
english, 1999