Effects of a quartz beam-guide on high-precision...

Effects of a quartz beam-guide on high-precision laser-assisted etching of Al2O3 ceramics

Hideyuki Horisawa, Noritoshi Akimoto, Hiroaki Ashizawa, Nobuo Yasunaga
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Volume:
112
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(98)00807-x
File:
PDF, 947 KB
english, 1999
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