Multi-ion species model with initial presheath profile for...

Multi-ion species model with initial presheath profile for plasma source ion implantation

Hyung-Jin Kim
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Volume:
112
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(98)00834-2
File:
PDF, 315 KB
english, 1999
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