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Multidimensional optimisation of process parameters by experimental design for the deposition of aluminium and silicon oxynitride films with predictable composition
Sabine Dreer, Robert Krismer, Peter WilhartitzVolume:
114
Year:
1999
Language:
english
Pages:
10
DOI:
10.1016/s0257-8972(99)00017-1
File:
PDF, 380 KB
english, 1999