Multidimensional optimisation of process parameters by...

Multidimensional optimisation of process parameters by experimental design for the deposition of aluminium and silicon oxynitride films with predictable composition

Sabine Dreer, Robert Krismer, Peter Wilhartitz
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Volume:
114
Year:
1999
Language:
english
Pages:
10
DOI:
10.1016/s0257-8972(99)00017-1
File:
PDF, 380 KB
english, 1999
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