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Low temperature growth mechanism of zirconium diboride films synthesised in flowing microwave Ar–BCl3 post-discharges
J.F. Pierson, T. Belmonte, H. MichelVolume:
116-119
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(99)00090-0
File:
PDF, 301 KB
english, 1999