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Comparative measurements of annihilation rate coefficients of fluorine radicals in a r.f. SF6 plasma by different time-resolved actinometry techniques
V. Shogun, A. Tyablikov, V. Pashkov, W. Scharff, T. Wallendorf, S. MarkeVolume:
116-119
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(99)00098-5
File:
PDF, 170 KB
english, 1999