The critical role of hydrogen for physical sputtering with Ar–H2 glow discharges
C.V. Budtz-Jørgensen, P. Kringhøj, J. BøttigerVolume:
116-119
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(99)00126-7
File:
PDF, 220 KB
english, 1999