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PIC-MCC simulation of a r.f. planar magnetron discharge and comparison with experiment
T.M. Minea, J. Bretagne, G. Gousset, L. Magne, D. Pagnon, M. TouzeauVolume:
116-119
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(99)00187-5
File:
PDF, 248 KB
english, 1999