Optical emission spectroscopy studies of titanium nitride sputtering on thermoplastic polymers
M. Neuhäuser, S. Bärwulf, H. Hilgers, E. Lugscheider, M. RiesterVolume:
116-119
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(99)00214-5
File:
PDF, 279 KB
english, 1999