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Effect of hidden parameters for the plasma CVD synthesis of diamond films
Friedericke Deuerler, Volker Buck, Jürgen Peterseim, Heiko GrunerVolume:
116-119
Year:
1999
Language:
english
Pages:
12
DOI:
10.1016/s0257-8972(99)00288-1
File:
PDF, 1.96 MB
english, 1999