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Different pulse techniques for stationary reactive sputtering with double ring magnetron
H. Bartzsch, P. Frach, K. Goedicke, Chr. GottfriedVolume:
120-121
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(99)00365-5
File:
PDF, 468 KB
english, 1999