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Chemical structure of films grown by AlN laser ablation: an X-ray photoelectron spectroscopy study
N. Laidani, L. Vanzetti, M. Anderle, A. Basillais, C. Boulmer-Leborgne, J. PerriereVolume:
122
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(99)00377-1
File:
PDF, 138 KB
english, 1999