![](/img/cover-not-exists.png)
Annealing effects on near stoichiometric a-SiC:H films
A.L. Baia Neto, S.S. Camargo Jr., R. Carius, F. Finger, W. BeyerVolume:
120-121
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(99)00390-4
File:
PDF, 219 KB
english, 1999