[IEEE 2015 Joint International EUROSOI Workshop and...

[IEEE 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) - Bologna, Italy (2015.1.26-2015.1.28)] EUROSOI-ULIS 2015: 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon - Characterization of bonding surface and electrical insulation properties of inter layer dielectrics for 3D monolithic integration

Garidis, K., Jayakumar, G., Asadollahi, A., Dentoni Litta, E., Hellstrom, P.-E., Ostling, M.

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Year:

2015

Language:

english

DOI:

10.1109/ULIS.2015.7063799

File:

PDF, 624 KB

english, 2015

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