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A comparative study of the nanoscratching behavior of amorphous carbon films grown under various deposition conditions
C. Charitidis, S. Logothetidis, M. GiotiVolume:
125
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(99)00546-0
File:
PDF, 207 KB
english, 2000