Determination of resputtering yields in carbon nitride films grown by dual ion beam sputtering
C. Quirós, P. Prieto, E. Elizalde, R. Pérez-Casero, V. Gómez, P. Herrero, J.M. SanzVolume:
125
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(99)00618-0
File:
PDF, 121 KB
english, 2000