Enhancement of mechanical properties of TiN/AlN multilayers...

Enhancement of mechanical properties of TiN/AlN multilayers by modifying the number and the quality of interfaces

Anne Thobor, Christophe Rousselot, Christine Clement, Jamal Takadoum, Nicolas Martin, Rosendo Sanjines, Francis Levy
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Volume:
124
Year:
2000
Language:
english
Pages:
12
DOI:
10.1016/s0257-8972(99)00655-6
File:
PDF, 974 KB
english, 2000
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