![](/img/cover-not-exists.png)
Enhancement of mechanical properties of TiN/AlN multilayers by modifying the number and the quality of interfaces
Anne Thobor, Christophe Rousselot, Christine Clement, Jamal Takadoum, Nicolas Martin, Rosendo Sanjines, Francis LevyVolume:
124
Year:
2000
Language:
english
Pages:
12
DOI:
10.1016/s0257-8972(99)00655-6
File:
PDF, 974 KB
english, 2000