[IEEE 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2015.5.3-2015.5.6)] 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Composite attribute method and software to interlock semiconductor product design and manufacturing yield
Bickford, Jeanne P., Rolfing, Lori, Sullivan, Candance, They, Carlos, Wolf, Edward M., Yoder, Joseph W., Niekrewicz, PaulYear:
2015
Language:
english
DOI:
10.1109/ASMC.2015.7164432
File:
PDF, 317 KB
english, 2015