[IEEE 1997 47th Electronic Components and Technology Conference - San Jose, CA, USA (18-21 May 1997)] 1997 Proceedings 47th Electronic Components and Technology Conference - Determination of Young's modulus of thin films used in embedded passive devices
Djakaria, R., Chandran, B.I., Gordon, M.H., Schmidt, W.F., Lenihan, T.G.Year:
1997
Language:
english
DOI:
10.1109/ECTC.1997.606253
File:
PDF, 511 KB
english, 1997