![](/img/cover-not-exists.png)
[IEEE 2015 International Conference on IC Design & Technology (ICICDT) - Leuven, Belgium (2015.6.1-2015.6.3)] 2015 International Conference on IC Design & Technology (ICICDT) - Plasma induced damage investigation in the fully depleted SOI technology
Akbal, M., Ribes, G., Guillermet, M., Vallier, L.Year:
2015
Language:
english
DOI:
10.1109/ICICDT.2015.7165900
File:
PDF, 353 KB
english, 2015