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WC-based thin films obtained by reactive radio-frequency magnetron sputtering using W target and methane gas
Nazon, J., Herbst, M., Marco de Lucas, M.C., Bourgeois, S., Domenichini, B.Volume:
591
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.08.035
Date:
September, 2015
File:
PDF, 1.24 MB
english, 2015