SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - 3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls
Nimo, Antwi, Mescheder, Ulrich, Müller, Bernhard, Saad Abou Elkeir, Awad, Schmid, Ulrich, Sánchez-Rojas, José Luis, Leester-Schaedel, MonikaVolume:
8066
Year:
2011
Language:
english
DOI:
10.1117/12.886876
File:
PDF, 9.82 MB
english, 2011